Reverse pillar—a self-aligned and self- planarised metallisation scheme for submicron technology
| Autor: | Yeh, JL, Hills, GW, Cochran, WT, Rana, VVS, Garcia, AM |
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| Zdroj: | In Vacuum 1988 38(8):817-821 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Yeh, JL, Hills, GW, Cochran, WT, Rana, VVS, Garcia, AM |
|---|---|
| Zdroj: | In Vacuum 1988 38(8):817-821 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|