The formation of buried oxide layers by ion implantation
| Autor: | Woods, TA, Antonelli, E, Collins, RA, Chivers, DJ, Dearnaley, G |
|---|---|
| Zdroj: | In Vacuum 1986 36(11):883-885 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Woods, TA, Antonelli, E, Collins, RA, Chivers, DJ, Dearnaley, G |
|---|---|
| Zdroj: | In Vacuum 1986 36(11):883-885 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|