Physics of ion plating and ion beam deposition: S Aisenberg and R W Chabot, (Proc 19th Nat Symp Am Vac Soc) J Vac Sci technol, 10 (1), Jan/Feb 1973, 104–107

Zdroj: In Vacuum 1973 23(9):340-340
Databáze: ScienceDirect
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