The chemical vapour deposition of indium and copper/indium alloys from metal hexafluoracetylacetonate complexes
| Autor: | Jones, Philip A., Jackson, Andrew D., Pilkington, Richard D., Lickiss, Paul D. |
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| Zdroj: | In Thin Solid Films 1993 229(1):5-7 |
| Databáze: | ScienceDirect |
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