Fluorinated polymer films from r.f. plasmas containing benzene and sulfur hexafluorine
| Autor: | Durrant, Steven F., Mota, Rogério P., de Moraes, Mario A.B. |
|---|---|
| Zdroj: | In Thin Solid Films 1992 220(1):295-302 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Durrant, Steven F., Mota, Rogério P., de Moraes, Mario A.B. |
|---|---|
| Zdroj: | In Thin Solid Films 1992 220(1):295-302 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|