IR spectra and etch rates of plasma-enhanced chemically vapour-deposited phosphosilicate glass films
| Autor: | Alexieva, Z.I., Tzoneva, M.A., Dichkov, D.A. |
|---|---|
| Zdroj: | In Thin Solid Films 1986 140(2):269-276 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Alexieva, Z.I., Tzoneva, M.A., Dichkov, D.A. |
|---|---|
| Zdroj: | In Thin Solid Films 1986 140(2):269-276 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|