Low-energy mass-separated ion beam deposition of materials
| Autor: | Tokuyama, Takashi, Yagi, Kunihiro, Miyake, Kiyoshi, Tamura, Masao, Natsuaki, Nobuyoshi, Tachi, Shin'ichi |
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| Zdroj: | In Nuclear Instruments and Methods 1981 182 Part 1:241-250 |
| Databáze: | ScienceDirect |
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