Microstructures of hydrogenated amorphous carbon films prepared by rf plasma CVD
| Autor: | Shimizu, Hideki, Nakao, Setsuo, Kusakabe, Hiroshi, Noda, Mikio |
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| Zdroj: | In Journal of Non-Crystalline Solids 1989 114 Part 1:196-198 |
| Databáze: | ScienceDirect |
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