New susceptor arrangement for the epitaxial growth of β-SiC on silicon
| Autor: | von Münch, Waldemar, Ruhnau, Ulrich |
|---|---|
| Zdroj: | In Journal of Crystal Growth 1996 158(4):491-496 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | von Münch, Waldemar, Ruhnau, Ulrich |
|---|---|
| Zdroj: | In Journal of Crystal Growth 1996 158(4):491-496 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect