Generation kinetics of pyramidal hillock and crystallographic defect on Si(111) vicinal surfaces grown with SiH 2Cl 2
| Autor: | Mazumder, Motaharul K., Mashiko, Y., Koyama, M.H., Takakuwa, Y., Miyamoto, N. |
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| Zdroj: | In Journal of Crystal Growth 1995 155(3):183-192 |
| Databáze: | ScienceDirect |
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