Metalorganic molecular beam epitaxy of γ-Al 2O 3 insulator films on Si with laser irradiation
| Autor: | Sawada, Kazuaki, Ishida, Makoto, Nakamura, Tetsuro, Suzaki, Tetsuo |
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| Zdroj: | In Journal of Crystal Growth 1989 95(1):494-499 |
| Databáze: | ScienceDirect |
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