Dissociative excitation of SiH 4 by collisions with helium active species
Autor: | Tsuji, Masaharu, Kobarai, Kazunari, Yamaguchi, Surnio, Nishimura, Yukio |
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Zdroj: | In Chemical Physics Letters 1989 158(5):470-474 |
Databáze: | ScienceDirect |
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