Handbook of Ion Beam Processing Technology : Principles, Deposition, Film Modification and Synthesis

Autor:	Jerome J. Cuomo, Stephen M. Rossnagel, Harold R. Kaufman
Předmět:	Ion implantation, Ion bombardment--Industrial applications
Kategorie:	TECHNOLOGY & ENGINEERING / Materials Science / General, SCIENCE / Physics / Quantum Theory, TECHNOLOGY & ENGINEERING / Metallurgy
Popis:	Deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, the synthesis of material in thin film form, and the modification of the properties of thin films.
Databáze:	eBook Index
Externí odkaz:	Zobrazit plný text záznamu