Scalable, Modular Three-Dimensional Silicon Microelectrode Assembly via Electroless Plating

Autor: Jörg Scholvin, Anthony Zorzos, Justin Kinney, Jacob Bernstein, Caroline Moore-Kochlacs, Nancy Kopell, Clifton Fonstad, Edward S. Boyden
Jazyk: angličtina
Rok vydání: 2018
Předmět:
Zdroj: Micromachines, Vol 9, Iss 9, p 436 (2018)
Druh dokumentu: article
ISSN: 2072-666X
DOI: 10.3390/mi9090436
Popis: We devised a scalable, modular strategy for microfabricated 3-D neural probe synthesis. We constructed a 3-D probe out of individual 2-D components (arrays of shanks bearing close-packed electrodes) using mechanical self-locking and self-aligning techniques, followed by electroless nickel plating to establish electrical contact between the individual parts. We detail the fabrication and assembly process and demonstrate different 3-D probe designs bearing thousands of electrode sites. We find typical self-alignment accuracy between shanks of
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