THE STUDY OF MICROELECTROMECHANICAL PIEZOELECTRIC STRUCTURES BY THE METHOD OF ATOMIC FORCE MICROSCOPY
| Autor: | К. В. Базіло, С. О. Білокінь, М. О. Бондаренко, В. В. Медяник |
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| Jazyk: | English<br />Ukrainian |
| Rok vydání: | 2018 |
| Předmět: | |
| Zdroj: | Вісник Черкаського державного технологічного університету, Vol 1, Iss 3, Pp 21-26 (2018) |
| Druh dokumentu: | article |
| ISSN: | 2306-4412 2708-6070 |
| DOI: | 10.24025/2306-4412.3.2018.162704 |
| Popis: | Currently leading manufacturers of electronic components serially produce a rather extensive list of elements, in which various microelectromechanical structures are included, such as various accelerometers, which are produced by millions of copies, resonators and electrical signals filters implemented on their basis, transformers and other microminiature electromechanical systems. The main advantage of using of elements, made of piezoceramic materials, in measuring devices is determined by their special structure, which allows to implement in one such element fundamentally different schemes, for example, for simultaneous measurement of temperature, pressure and humidity. The purpose of the work is to investigate hidden microdefects and microroughnesses of the surfaces of piezoelectric transducers using atomic force microscopy. |
| Databáze: | Directory of Open Access Journals |
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