NEXAFS study of electronic and atomic structure of active layer in Al/indium tin oxide/TiO2 stack during resistive switching

Autor: Elena Filatova, Aleksei Konashuk, Yuri Petrov, Evgeny Ubyivovk, Andrey Sokolov, Andrei Selivanov, Victor Drozd
Jazyk: angličtina
Rok vydání: 2016
Předmět:
Zdroj: Science and Technology of Advanced Materials, Vol 17, Iss 1, Pp 274-284 (2016)
Druh dokumentu: article
ISSN: 1468-6996
1878-5514
14686996
DOI: 10.1080/14686996.2016.1182851
Popis: We have studied the stability of the resistive switching process in the Al/(In2O3)0.9(SnO2)0.1/TiO2 assembly grown by atomic layer deposition. Besides electrical characterization the effect of electric field on the atomic electronic structure of the TiO2 layer was studied using near edge X-ray absorption fine structure (NEXAFS) spectroscopy. The region of the current instability in the I-V characteristics was revealed. Presumably this current instability is supported by the amorphous structure of the TiO2 film but is initiated by the surface morphology of the Al substrate. A formation of the O2 molecules was established which occurs specifically in the region of the current instability that is a result of electrical Joule heating manifestation.
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