Experiments and Identification of the Unbalance of Aerostatic Guideways on the Micro-Scale

Autor: Dongju Chen, Yanhua Bian, Jinwei Fan
Jazyk: angličtina
Rok vydání: 2014
Předmět:
Zdroj: Sensors, Vol 14, Iss 3, Pp 4416-4427 (2014)
Druh dokumentu: article
ISSN: 1424-8220
DOI: 10.3390/s140304416
Popis: In order to diagnose the unbalance of aerostatic guideways, displacement and acceleration sensors were used to measure the vibration signals of the unbalance of the aerostatic guideways caused by the gas fluctuation. The frequency characteristics for the unbalance of aerostatic guideways caused by gas fluctuation has been extracted from the measured signals by power spectral density, and the basic frequencies of the guideway system have been diagnosed according to spectral characteristics, in agreement with the results calculated by the corresponding motion equations and the finite element method.
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