| Autor: |
Chiara De Pascali, Alvise Bagolini, Donatella Duraccio, Pietro Siciliano, Luca Francioso |
| Jazyk: |
angličtina |
| Rok vydání: |
2018 |
| Předmět: |
|
| Zdroj: |
Proceedings, Vol 2, Iss 13, p 968 (2018) |
| Druh dokumentu: |
article |
| ISSN: |
2504-3900 |
| DOI: |
10.3390/proceedings2130968 |
| Popis: |
SixNy/a-Si/SixNy thin film RF-MEMS switches were fabricated by unconventional PECVD process using surface micromachining approach. The mechanical properties of tri-layer were measured by nanoindentation and wafer curvature method. Deflections of switches clamped on two opposite edges were measured by a profilometer applying increasing quasi-point pressure loads. Finite Element Analysis (FEA) was used to study the mechanical behavior of clamped-clamped switches. An analytical solution was developed and validated, numerically and experimentally, to describe the load-deflection response of perforated membranes to quasi-point loads. The proposed function was used to determine the internal stress of the investigated membranes; the relative error between the predicted and calculated stress values was in the range 2.1–8.5%. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
|
