| Autor: |
D P Lozano, M Mongillo, X Piao, S Couet, D Wan, Y Canvel, A M Vadiraj, Ts Ivanov, J Verjauw, R Acharya, J Van Damme, F A Mohiyaddin, J Jussot, P P Gowda, A Pacco, B Raes, J Van de Vondel, I P Radu, B Govoreanu, J Swerts, A Potočnik, K De Greve |
| Jazyk: |
angličtina |
| Rok vydání: |
2024 |
| Předmět: |
|
| Zdroj: |
Materials for Quantum Technology, Vol 4, Iss 2, p 025801 (2024) |
| Druh dokumentu: |
article |
| ISSN: |
2633-4356 |
| DOI: |
10.1088/2633-4356/ad4b8c |
| Popis: |
The performance of state-of-the-art superconducting quantum devices is currently limited by microwave dielectric loss at different interfaces. α -tantalum is a superconductor that has proven effective in reducing dielectric loss and improving device performance due to its thin low-loss oxide. Here, we demonstrate the fabrication of high-quality factor α -tantalum coplanar-waveguide resonators directly on pristine 300 mm silicon wafers over a variety of metal deposition conditions and perform a comprehensive material and electrical characterization study. Additionally, we apply a surface treatment based on hydrofluoric acid that allows us to modify different resonators surfaces, leading to a reduction in two-level system loss in the devices by a factor of three. This loss reduction can be entirely attributed to the removal of surface oxides. Our study indicates that large scale manufacturing of low-loss superconducting circuits should indeed be feasible and suggests a viable avenue to materials-driven advancements in superconducting circuit performance. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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