Contrast Analysis of Polarization in Three-Beam Interference Lithography
| Autor: | Fuping Peng, Jing Du, Jialin Du, Simo Wang, Wei Yan |
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| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: | |
| Zdroj: | Applied Sciences, Vol 11, Iss 11, p 4789 (2021) |
| Druh dokumentu: | article |
| ISSN: | 11114789 2076-3417 |
| DOI: | 10.3390/app11114789 |
| Popis: | This paper analyzes the effect of polarization and the incident angle on the contrasts of interference patterns in three-beam interference lithography. A non-coplanar laser interference system was set up to simulate the relationship between contrast, beam polarization, and the incident angle. Different pattern periods require different incident angles, which means different contrast losses in interference lithography. Two different polarization modes were presented to study the effects of polarization with different incident angles based on theoretical analysis simulations. In the case of the co-directional component TE polarization mode, it was demonstrated that the pattern contrast decreases with the increase in the incident angle and the contrast loss caused by the polarization angle error also grew rapidly. By changing the mode to azimuthal (TE-TE-TE) polarization, the contrast of the interference pattern can be ensured to remain above 0.97 even though the incident angle is large. In addition, TE-TE-TE mode can accept larger polarization angle errors. This conclusion provides a theoretical basis for the generation of high-contrast light fields at different incident angles, and the conclusion is also applicable to multi-beam interference lithography. |
| Databáze: | Directory of Open Access Journals |
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