Silicon MEMS Thermocatalytic Gas Sensor in Miniature Surface Mounted Device Form

Autor: Nikolay Samotaev, Pavel Dzhumaev, Konstantin Oblov, Alexander Pisliakov, Ivan Obraztsov, Csaba Ducso, Ferenc Biro
Jazyk: angličtina
Rok vydání: 2021
Předmět:
Zdroj: Chemosensors, Vol 9, Iss 12, p 340 (2021)
Druh dokumentu: article
ISSN: 2227-9040
DOI: 10.3390/chemosensors9120340
Popis: A reduced size thermocatalytic gas sensor was developed for the detection of methane over the 20% of the explosive concentration. The sensor chip is formed from two membranes with a 150 µm diameter heated area in their centers and covered with highly dispersed nano-sized catalyst and inert reference, respectively. The power dissipation of the chip is well below 70 mW at the 530 °C maximum operation temperature. The chip is mounted in a novel surface mounted metal-ceramic sensor package in the form-factor of SOT-89. The sensitivity of the device is 10 mV/v%, whereas the response and recovery times without the additional carbon filter over the chip are
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