Looking Inside Micro- and Nano-Mechanical Pillar Resonators: A Picosecond Ultrasonics Approach
| Autor: | Paul Stritt, Juliane Doster, Thomas Dekorsy, Vitalyi Gusev, Eva Weig, Mike Hettich |
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| Jazyk: | angličtina |
| Rok vydání: | 2020 |
| Předmět: | |
| Zdroj: | Proceedings, Vol 56, Iss 1, p 31 (2020) |
| Druh dokumentu: | article |
| ISSN: | 20200560 2504-3900 |
| DOI: | 10.3390/proceedings2020056031 |
| Popis: | Pillar-shaped Gallium arsenide (GaAs) micromechanical resonators are fabricated, and the feasibility to measure the inside of the pillars in the axial direction with laser-induced GHz ultrasound based on picosecond ultrasonics is tested. Measurements on the pillars with head sizes in the µm range show excellent agreement with theoretical predictions. |
| Databáze: | Directory of Open Access Journals |
| Externí odkaz: |
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