Purity of Ion Beams: Analysis and Simulation of Mass Spectra and Mass Interferences in Ion Implantation

Autor:	Volker Häublein, Heiner Ryssel, Lothar Frey
Jazyk:	angličtina
Rok vydání:	2012
Předmět:	Materials of engineering and construction. Mechanics of materials TA401-492
Zdroj:	Advances in Materials Science and Engineering, Vol 2012 (2012)
Druh dokumentu:	article
ISSN:	1687-8434 1687-8442
DOI:	10.1155/2012/610150
Popis:	This paper shows that charge exchange events and dissociation reactions of ions may impact the purity of the ion beam in ion implantation, leading to contamination of the implanted target. Physical relations are derived that explain why unwanted ions are transported in the ion beam despite of a magnetic mass separation. Based on those relations, the simulation tool ENCOTION (ENergetic COntamination simulaTION) has been developed. ENCOTION is a very powerful tool for the simulation of transport mechanisms of ions through a magnet analyzer and for the simulation of mass spectra, as will be demonstrated in this paper.
Databáze:	Directory of Open Access Journals
Externí odkaz:	https://doaj.org/article/bba32e51505d417d97ed07166d5f77e4 Zobrazit plný text záznamu View record in DOAJ Plný text ve formátu PDF