Characterization of SOI MOSFETs by means of charge-pumping
Autor: | Grzegorz Głuszko, Sławomir Szostak, Heinrich Gottlob, Max Lemme, Lidia Łukasiak |
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Jazyk: | angličtina |
Rok vydání: | 2023 |
Předmět: | |
Zdroj: | Journal of Telecommunications and Information Technology, Iss 3 (2023) |
Druh dokumentu: | article |
ISSN: | 1509-4553 1899-8852 |
DOI: | 10.26636/jtit.2007.3.832 |
Popis: | This paper presents the results of charge-pumping measurements of SOI MOSFETs. The aim of these measurements is to provide information on the density of interface traps at the front and back Si-SiO2 interface. Three-level charge-pumping is used to obtain energy distribution of interface traps at front-interface |
Databáze: | Directory of Open Access Journals |
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