| Autor: |
Jana Marie Meyer, Viktor Schell, Jingxiang Su, Simon Fichtner, Erdem Yarar, Florian Niekiel, Thorsten Giese, Anne Kittmann, Lars Thormählen, Vadim Lebedev, Stefan Moench, Agnė Žukauskaitė, Eckhard Quandt, Fabian Lofink |
| Jazyk: |
angličtina |
| Rok vydání: |
2021 |
| Předmět: |
|
| Zdroj: |
Sensors, Vol 21, Iss 24, p 8166 (2021) |
| Druh dokumentu: |
article |
| ISSN: |
1424-8220 |
| DOI: |
10.3390/s21248166 |
| Popis: |
In this work, the first surface acoustic-wave-based magnetic field sensor using thin-film AlScN as piezoelectric material deposited on a silicon substrate is presented. The fabrication is based on standard semiconductor technology. The acoustically active area consists of an AlScN layer that can be excited with interdigital transducers, a smoothing SiO2 layer, and a magnetostrictive FeCoSiB film. The detection limit of this sensor is 2.4 nT/Hz at 10 Hz and 72 pT/Hz at 10 kHz at an input power of 20 dBm. The dynamic range was found to span from about ±1.7 mT to the corresponding limit of detection, leading to an interval of about 8 orders of magnitude. Fabrication, achieved sensitivity, and noise floor of the sensors are presented. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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