| Autor: |
Zachary H. Levine, Bradley K. Alpert, Amber L. Dagel, Joseph W. Fowler, Edward S. Jimenez, Nathan Nakamura, Daniel S. Swetz, Paul Szypryt, Kyle R. Thompson, Joel N. Ullom |
| Jazyk: |
angličtina |
| Rok vydání: |
2023 |
| Předmět: |
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| Zdroj: |
Microsystems & Nanoengineering, Vol 9, Iss 1, Pp 1-11 (2023) |
| Druh dokumentu: |
article |
| ISSN: |
2055-7434 |
| DOI: |
10.1038/s41378-023-00510-6 |
| Popis: |
Abstract We show three-dimensional reconstructions of a region of an integrated circuit from a 130 nm copper process. The reconstructions employ x-ray computed tomography, measured with a new and innovative high-magnification x-ray microscope. The instrument uses a focused electron beam to generate x-rays in a 100 nm spot and energy-resolving x-ray detectors that minimize backgrounds and hold promise for the identification of materials within the sample. The x-ray generation target, a layer of platinum, is fabricated on the circuit wafer itself. A region of interest is imaged from a limited range of angles and without physically removing the region from the larger circuit. The reconstruction is consistent with the circuit’s design file. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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