Synthesis and Microstructural Characterization of SnO2:F Thin Films Deposited by AACVD
| Autor: | Karen Alejandra Chavarría-Castillo, Patricia Amézaga-Madrid, Oswaldo Esquivel-Pereyra, Wilber Antúnez-Flores, Pedro Pizá Ruiz, Mario Miki-Yoshida |
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| Jazyk: | angličtina |
| Rok vydání: | 2016 |
| Předmět: | |
| Zdroj: | Materials Research, Vol 19, Iss suppl 1, Pp 97-102 (2016) |
| Druh dokumentu: | article |
| ISSN: | 1516-1439 1980-5373 |
| DOI: | 10.1590/1980-5373-mr-2016-0350 |
| Popis: | In this work, we report the synthesis and microstructural characterization of Tin oxide thin films doped with fluorine for applications such as transparent conductive oxides. Tin oxide doped with fluorine thin films were deposited by aerosol assisted chemical vapor deposition technique onto a borosilicate glass substrate, using a precursor solution of stannic chloride in ethanol and ammonium fluoride as the dopant. Deposition temperature was varied between 623-773 K. Also, other deposition parameters such as concentration of the precursor solution and gas carrier flux were fixed at 0.1 mol∙dm-3 and 5 L min-1 respectively. Results indicate the presence of only the cassiterite phase of Tin oxide in all samples. Thin films obtained were characterized by X-Ray Diffraction. Surface morphology and microstructure were studied by field emission scanning electron microscopy, optical properties of samples were analyzed by total transmittance and reflectance spectra. The resistivity value of the films was measured by the sheet resistance. |
| Databáze: | Directory of Open Access Journals |
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