| Autor: |
P. Xu, Y. Yu, R. J. Liu, K. Zha, L. Zhou, Y. T. Liu, Z. Xu |
| Jazyk: |
angličtina |
| Rok vydání: |
2023 |
| Předmět: |
|
| Zdroj: |
AIP Advances, Vol 13, Iss 3, Pp 035006-035006-6 (2023) |
| Druh dokumentu: |
article |
| ISSN: |
2158-3226 |
| DOI: |
10.1063/5.0135004 |
| Popis: |
In this paper, a real-time diagnostic based on the spectral-domain optical coherence technique has been developed to measure the hole depth during femtosecond laser drilling. This diagnostic borrows the idea of a fiber interferometer, and the hole is integrated as a part of the sample arm. By means of investigating the interference fringes detected by the line camera, the hole depth can be extracted. This diagnostic utilizes a broadband small-volume super-luminescent diode as the coherent light source, which has a central wavelength of 833 nm and a full width at half maximum of 24 nm. It has a temporal resolution of 50 µs and a maximal theoretic depth resolution of 12.8 µm. Three kinds of metal samples have been tested, confirming the ability of depth measurement. Copper has been proven to have the best-normalized reflectivity during drilling compared with aluminum alloy and stainless steel. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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