| Autor: |
Steffen Bornemann, Jan Gulink, Victor Moro, Joan Canals Gil, Stefan Wolter, Georg Schottler, Daria Bezshlyakh, Joan Daniel Prades, Angel Dieguez, Andreas Waag |
| Jazyk: |
angličtina |
| Rok vydání: |
2021 |
| Předmět: |
|
| Zdroj: |
IEEE Photonics Journal, Vol 13, Iss 5, Pp 1-9 (2021) |
| Druh dokumentu: |
article |
| ISSN: |
1943-0655 |
| DOI: |
10.1109/JPHOT.2021.3106584 |
| Popis: |
MicroLED arrays with the capability of switching each pixel separately with high frequency can serve as structured micro-illumination light engines for applications in sensing, optogenetics, microscopy and many others. We describe a scalable chip process chain for the fabrication of passive-matrix microLED arrays, which were integrated with PCB-based driving electronics. The arrays were produced by deep-etching of conventional planar LED structures on sapphire, followed by filling and planarization steps. The pixel resolution lies in the range of 254 to 2540 pixels-per-inch (ppi), the arrays consist of 32 x 32 pixels. Optical output powers up to 50 µW per pixel were measured. In comparison to CMOS-based approaches, the presented technology is a simplified strategy to produce microLED arrays with high pixel counts. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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