| Autor: |
Chen Li, Qiulin Tan, Chenyang Xue, Wendong Zhang, Yunzhi Li, Jijun Xiong |
| Jazyk: |
angličtina |
| Rok vydání: |
2014 |
| Předmět: |
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| Zdroj: |
Sensors, Vol 14, Iss 12, Pp 23337-23347 (2014) |
| Druh dokumentu: |
article |
| ISSN: |
1424-8220 |
| DOI: |
10.3390/s141223337 |
| Popis: |
An LC resonant pressure sensor with improved performance is presented in this paper. The sensor is designed with a buried structure, which protects the electrical components from contact with harsh environments and reduces the resonant-frequency drift of the sensor in high-temperature environments. The pressure-sensitive membrane of the sensor is optimized according to small-deflection-plate theory, which allows the sensor to operate in high-pressure environments. The sensor is fabricated using low-temperature co-fired ceramic (LTCC) technology, and a fugitive film is used to create a completed sealed embedded cavity without an evacuation channel. The experimental results show that the frequency drift of the sensor versus the temperature is approximately 0.75 kHz/°C, and the responsivity of the sensor can be up to 31 kHz/bar within the pressure range from atmospheric pressure to 60 bar. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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