Influence of UV/Ozone Treatment on Threshold Voltage Modulation in Sol–Gel IGZO Thin‐Film Transistors

Autor: Wonsik Kim, Won‐June Lee, Taehyun Kwak, Seokhyeon Baek, Seung‐Hoon Lee, Sungjun Park
Jazyk: angličtina
Rok vydání: 2022
Předmět:
Zdroj: Advanced Materials Interfaces, Vol 9, Iss 10, Pp n/a-n/a (2022)
Druh dokumentu: article
ISSN: 2196-7350
DOI: 10.1002/admi.202200032
Popis: Abstract Sol–gel indium–gallium–zinc oxide (IGZO) semiconductors are developed as active components of thin‐film transistors (TFTs) because of their high electron mobility, cost‐effective large‐area fabrication, and applicability for flexible substrates. Controlling oxygen vacancies (Vo) in the IGZO semiconductor channel is always problematic for reliable and long‐term operation. Surplus interfacial charges inside the IGZO channel cause negative shifts in threshold voltages (Vth), resulting in depletion‐mode operation and involuntary high current output. The room temperature and rapid (
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