| Autor: |
Kai Xu, Haixiang Hu, Xin Zhang, Hongda Wei, Zhiyu Zhang, Xuejun Zhang |
| Jazyk: |
angličtina |
| Rok vydání: |
2024 |
| Předmět: |
|
| Zdroj: |
Light: Advanced Manufacturing, Vol 5, Pp 1-9 (2024) |
| Druh dokumentu: |
article |
| ISSN: |
2689-9620 |
| DOI: |
10.37188/lam.2024.025 |
| Popis: |
Interferometry with computer-generated holograms (CGHs) is a unique solution for the highly accurate testing of large-aperture aspheric mirrors. However, no direct testing method for quantifying the measurement accuracy of CGHs has been developed. In this study, we developed a methodology for verifying CGH accuracy based on an element that is functionally equivalent to a large-aperture mirror in terms of accuracy verification. The equivalent element decreased the aperture by one or higher orders of magnitude, implying that the mirror could be replaced by a non-CGH technology in a comparison test. In this study, a 281 mm diamond-turned mirror was fabricated as the equivalent element of a 3.5 m aspheric mirror and measured using CGH and LUPHOScan profilometers. Surface error composition and root-mean-square (RMS) density analyses were performed. The methodology verification accuracy of the CGH was 4 nm (RMS) in the low- to mid-frequency bands, with a measured surface accuracy of approximately 10 nm (RMS). This methodology provides a feasible solution for CGH accuracy verification, ensuring high-accuracy and reliable testing of large-aperture aspheric mirrors. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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