| Autor: |
Linsen Xiong, Zhi-mei Qi |
| Jazyk: |
angličtina |
| Rok vydání: |
2023 |
| Předmět: |
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| Zdroj: |
Sensors, Vol 23, Iss 24, p 9912 (2023) |
| Druh dokumentu: |
article |
| ISSN: |
1424-8220 |
| DOI: |
10.3390/s23249912 |
| Popis: |
This study presents a grating interferometric acoustic sensor based on a flexible polymer diaphragm. A flexible-diaphragm acoustic sensor based on grating interferometry (GI) is proposed through design, fabrication and experimental demonstration. A gold-coated polyethylene terephthalate diaphragm was used for the sensor prototype. The vibration of the diaphragm induces a change in GI cavity length, which is converted into an electrical signal by the photodetector. The experimental results show that the sensor prototype has a flat frequency response in the voice frequency band and the minimum detectable sound pressure can reach 164.8 µPa/√Hz. The sensor prototype has potential applications in speech acquisition and the measurement of water content in oil. This study provides a reference for the design of optical interferometric acoustic sensor with high performance. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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