Spacer Dielectric Analysis of Multi-Channel Nanosheet FET for Nanoscale Applications

Autor: Asisa Kumar Panigrahy, Veera Venkata Sai Amudalapalli, Depuru Shobha Rani, Muralidhar Nayak Bhukya, Hima Bindu Valiveti, Vakkalakula Bharath Sreenivasulu, Raghunandan Swain
Jazyk: angličtina
Rok vydání: 2024
Předmět:
Zdroj: IEEE Access, Vol 12, Pp 73160-73168 (2024)
Druh dokumentu: article
ISSN: 2169-3536
DOI: 10.1109/ACCESS.2024.3392621
Popis: This work investigates the effect of single and dual-k spacer materials consisting of different dielectric constants (k) in optimized nano-channel gate-stack nanosheet (NS-FET) employing hafnium oxide and silicon dioxide as gate insulator to improve its sub-threshold performance. The effect of the external low-k spacer modification in the dual-k spacer has been shown by adjusting the inner high-k spacer. The drain-induced barrier lowering (DIBL) in this modification with dual-k spacer is 14 mV/V, a significant improvement above single spacer NS-FET. The Visual TCAD 3D Cogenda tool is used to examine the performance of the developed NS-FET with air, single, dual-k, and hybrid spacers. The CADENCE platform is used to perform circuit aspects. Additionally, a comparison of the device architecture’s performance study with respect to DC characteristics is made. DC parameters of the proposed device are established: $I_{ON}$ to $I_{OFF}$ ratio of approximately $10^{5}$ , DIBL of approximately 14 mV/V, sub-threshold swing (SS) of approximately 62 mV/dec, and low threshold voltage (Vth) of 0.38 V. The analysis on power consumption for advanced NS-FET is also analyzed with single-k and dual-k spacers. The performance of single-k and dual-k spacer dielectric variation for CMOS inverter is also shown. Furthermore, low power consumption by this NS-FET ensures improved device performance suitable for nanoscale semiconductor industries.
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