V-shaped dislocations in a GaN epitaxial layer on GaN substrate

Autor: Atsushi Tanaka, Kentaro Nagamatsu, Shigeyoshi Usami, Maki Kushimoto, Manato Deki, Shugo Nitta, Yoshio Honda, Michal Bockowski, Hiroshi Amano
Jazyk: angličtina
Rok vydání: 2019
Předmět:
Zdroj: AIP Advances, Vol 9, Iss 9, Pp 095002-095002-4 (2019)
Druh dokumentu: article
ISSN: 2158-3226
DOI: 10.1063/1.5114866
Popis: In this study, V-shaped dislocations in a GaN epitaxial layer on a free-standing GaN substrate were observed. Our investigation further revealed that the V-shaped dislocations were newly generated at the interface in the epilayer rather than propagated from the GaN substrate. V-shaped dislocations consist of two straight parts. The straight parts of the V-shaped dislocations were separated from each other in the m-direction and tilted toward the step-flow direction of the GaN epitaxial layer. The V-shaped dislocations are continuous single dislocations having a Burgers vector component of 1a and an intrinsic stacking fault between their straight parts.
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