Electromagnetic Micromotors—Design, Fabrication and Applications

Autor:	Stephanus Büttgenbach
Jazyk:	angličtina
Rok vydání:	2014
Předmět:	electromagnetic microactuators variable reluctance micromotors synchronous micromotors micropumps micropositioners microrobots Mechanical engineering and machinery TJ1-1570
Zdroj:	Micromachines, Vol 5, Iss 4, Pp 929-942 (2014)
Druh dokumentu:	article
ISSN:	2072-666X 26846179
DOI:	10.3390/mi5040929
Popis:	Microactuators have become essential elements of microelectromechanical systems, for example, for positioning purposes and for fluid-handling tasks in microfluidic systems. UV depth lithography and other new micromachining technologies, which have been developed since the 1990s, have initiated extensive investigations of electromagnetic microactuators, which are characterized by high forces, large deflections, low driving voltages resulting from low input impedances and robustness under harsh environments. This paper reviews the comprehensive research on the design, fabrication and application of electromagnetic micromotors performed in our laboratory over the past years.
Databáze:	Directory of Open Access Journals
Externí odkaz:	https://doaj.org/article/c9dcba65d268461793e96e321a902121 Zobrazit plný text záznamu View record in DOAJ