275 nm Deep Ultraviolet AlGaN-Based Micro-LED Arrays for Ultraviolet Communication

Autor: Liang Guo, Yanan Guo, Jiankun Yang, Jianchang Yan, Jianguo Liu, Junxi Wang, Tongbo Wei
Jazyk: angličtina
Rok vydání: 2022
Předmět:
Zdroj: IEEE Photonics Journal, Vol 14, Iss 1, Pp 1-5 (2022)
Druh dokumentu: article
ISSN: 1943-0655
DOI: 10.1109/JPHOT.2021.3129648
Popis: In this work, we fabricated and characterized 4 × 4 parallel flip-chip AlGaN-based micro-LED arrays with varied mesa diameters of 120 µm, 100 µm, 80 µm, and 60 µm. The reported micro-LED arrays have a maximum bandwidth of 380 MHz and a peak wavelength of ∼275 nm. It is found that the electrical and optical characteristics of AlGaN-based micro-LED arrays show strong size dependence for ultraviolet communication (UVC). The differential resistance increases from 28.8 Ω to 112 Ω, the external quantum efficiency (EQE) is increased by ∼30%, and the bandwidth doubles as the diameter of individual micro-LED decreases from 120 µm to 60 µm. Our research proves that tailoring the mesa size of parallel flip-chip AlGaN-based micro-LED arrays can further enhance its bandwidth and promote its application in UVC.
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