Au-Hyperdoped Si Nanolayer: Laser Processing Techniques and Corresponding Material Properties
| Autor: | Michael Kovalev, Alena Nastulyavichus, Ivan Podlesnykh, Nikita Stsepuro, Victoria Pryakhina, Evgeny Greshnyakov, Alexey Serdobintsev, Iliya Gritsenko, Roman Khmelnitskii, Sergey Kudryashov |
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| Jazyk: | angličtina |
| Rok vydání: | 2023 |
| Předmět: |
amorphous Si film
laser hyperdoping gold impurity energy-dispersive X-ray microspectroscopy X-ray photoelectron microspectroscopy Raman microspectroscopy Technology Electrical engineering. Electronics. Nuclear engineering TK1-9971 Engineering (General). Civil engineering (General) TA1-2040 Microscopy QH201-278.5 Descriptive and experimental mechanics QC120-168.85 |
| Zdroj: | Materials, Vol 16, Iss 12, p 4439 (2023) |
| Druh dokumentu: | article |
| ISSN: | 1996-1944 |
| DOI: | 10.3390/ma16124439 |
| Popis: | The absorption of light in the near-infrared region of the electromagnetic spectrum by Au-hyperdoped Si has been observed. While silicon photodetectors in this range are currently being produced, their efficiency is low. Here, using the nanosecond and picosecond laser hyperdoping of thin amorphous Si films, their compositional (energy-dispersion X-ray spectroscopy), chemical (X-ray photoelectron spectroscopy), structural (Raman spectroscopy) and IR spectroscopic characterization, we comparatively demonstrated a few promising regimes of laser-based silicon hyperdoping with gold. Our results indicate that the optimal efficiency of impurity-hyperdoped Si materials has yet to be achieved, and we discuss these opportunities in light of our results. |
| Databáze: | Directory of Open Access Journals |
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