| Autor: |
Tiago Vicentini Ferreira do Valle, Aldo Ghisi, Stefano Mariani, Gabriele Gattere, Francesco Rizzini, Luca Guerinoni, Luca Falorni |
| Jazyk: |
angličtina |
| Rok vydání: |
2022 |
| Předmět: |
|
| Zdroj: |
Engineering Proceedings, Vol 27, Iss 1, p 10 (2022) |
| Druh dokumentu: |
article |
| ISSN: |
2673-4591 |
| DOI: |
10.3390/ecsa-9-13363 |
| Popis: |
Microelectromechanical systems (MEMS) are nowadays widespread in the sensor market, with several different applications. New production techniques and ever smaller device geometries require a continuous investigation of potential failure mechanisms in such devices. This work presents an experimental on-chip setup to assess the geometry- and material-dependent strength of stoppers adopted to limit the deformation of movable parts, using an electrostatically actuated device. A series of comb-finger and parallel plate capacitors are used to provide a rather large stroke to a shuttle, connected to the anchors through flexible springs. Upon application of a varying voltage, failure of stoppers of variable size is observed and confirmed by post-mortem ΔC–V curves. The results of the experimental campaign are collected to infer the stochastic property of the strength of polycrystalline, columnar silicon films. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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