Design, Assembly, and Simulation of Flexure-Based Modular Micro-Positioning Stages

Autor: Shufan Liao, Bingxiao Ding, Yangmin Li
Jazyk: angličtina
Rok vydání: 2022
Předmět:
Zdroj: Machines, Vol 10, Iss 6, p 421 (2022)
Druh dokumentu: article
ISSN: 10060421
2075-1702
DOI: 10.3390/machines10060421
Popis: With flexure-based micro-positioning stages (MPSs) being in high demand for high-precision applications, the performance and cost of flexure-based MPSs are two issues that urgently need to be addressed. In addition, the current MPSs are being developed toward complex spatial configurations, which further precludes monolithic fabrication. To address the aforementioned issues, modular MPSs using designed standardized modules are introduced in this paper. Firstly, the motivations are described, followed by the modular design. In addition, a new assembly concept analogy with composing compounds is proposed for guiding module assembly, including some proposed planar and spatial configurations. For validation, the static and dynamic performances of modular MPSs with respect to different modules and materials are presented as case studies. The proposed modular MPSs can provide better flexibility and functionality for further applications.
Databáze: Directory of Open Access Journals