Imaging Mueller matrix ellipsometry setup for optical nanoform metrology

Autor: Käseberg Tim, Grundmann Jana, Dickmann Johannes, Kroker Stefanie, Bodermann Bernd
Jazyk: angličtina
Rok vydání: 2020
Předmět:
Zdroj: EPJ Web of Conferences, Vol 238, p 06006 (2020)
Druh dokumentu: article
ISSN: 2100-014X
DOI: 10.1051/epjconf/202023806006
Popis: We designed, realized, and characterised an imaging Mueller matrix ellipsometry setup for the pixelwise measurement of the Mueller matrices in microscope images. Our setup is capable of performing measurements in reflection as well as in transmission in a broad range of angles of incidence for wavelengths between 400 nm and 700 nm. We compared measurements of specially designed nanostructured samples with AFM and SEM measurements as well as with numerical simulations using the finite element method.
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