Effects of Substrate Bias Voltages on Tribological Properties of DLC Films under Rolling-Sliding Contact with High Pressure

Autor: Morimasa NAKAMURA, Hiromi KODAMA, Ken-ichi MIURA, Kei DEMIZU, Daisuke IBA, Ichiro MORIWAKI
Jazyk: angličtina
Rok vydání: 2012
Předmět:
Zdroj: Journal of Advanced Mechanical Design, Systems, and Manufacturing, Vol 6, Iss 1, Pp 121-130 (2012)
Druh dokumentu: article
ISSN: 1881-3054
DOI: 10.1299/jamdsm.6.121
Popis: In the present paper, tribological properties of DLC films deposited by UBM sputtering were investigated by rolling contact friction tests under approximately 2.86GPa of high contact pressure. DLC films were deposited by UBM sputtering under substrate bias voltages such as 0 to -300V. Friction coefficients of DLC films deposited under low bias voltage were unstable. And it was found that this unstable friction coefficient occurred when the counterpart ball began to contact with sliding. From observation of the cross section of DLC films after occurring unstable friction coefficients using SEM, the films were fractured in the a-C:H or Cr/C gradient interlayer. Moreover, these fractures had already occurred before sliding. DLC films were thought to be damaged by rolling with slightly sliding contact with high pressure in very short time. It was clear that DLC film deposited under substrate bias voltage -300V has the best performance for high contact pressure. And the change in Young's modulus of Cr/C gradient interlayer at the interface continuously seemed to be important to prevent the fracture of DLC film due to high pressure.
Databáze: Directory of Open Access Journals