| Autor: |
Federico Remaggi, Luca Pellegrino, Nicola Manca, Cristina Bernini, Daniele Marré |
| Jazyk: |
angličtina |
| Rok vydání: |
2017 |
| Předmět: |
|
| Zdroj: |
Proceedings, Vol 1, Iss 4, p 365 (2017) |
| Druh dokumentu: |
article |
| ISSN: |
2504-3900 |
| DOI: |
10.3390/proceedings1040365 |
| Popis: |
MicroElectroMechanical Systems (MEMS) made of heterostructures of crystalline oxide materials with targeted physical properties may be applied as sensors having different integrated functionalities. In this work, we explore the feasibility of manganite thin film based epitaxial MEMS for thermometric micromechanical sensing. We investigate the mechanical properties of La1−xSrxMnO3, with x ≈ 1/3, freestanding microbridges as a function of temperature for applications in the field of micromechanical temperature sensors. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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