Energy-Delay Sensitivity Analysis of a Nanoelectromechanical Relay With the Negative Capacitance of a Ferroelectric Capacitor

Autor: Chankeun Yoon, Gihun Choe, Changhwan Shin
Jazyk: angličtina
Rok vydání: 2020
Předmět:
Zdroj: IEEE Journal of the Electron Devices Society, Vol 8, Pp 365-372 (2020)
Druh dokumentu: article
ISSN: 2168-6734
DOI: 10.1109/JEDS.2020.2983197
Popis: The energy-delay sensitivity of a nanoelectromechanical (NEM) relay and an NEM relay with the negative capacitance of a ferroelectric capacitor (NC + NEM relay) are theoretically investigated. The energy-delay characteristics of the NC + NEM relay deteriorate compared to those of the NEM relay when its movable beam becomes shorter/thicker than the critical beam length/thickness. The energy-delay characteristics of the NC + NEM relay (vs. the NEM relay) can be improved by increasing/decreasing the movable beam length/thickness. However, the maximum length and minimum thickness of the movable electrode are specified. This is necessary to avoid stuck-on failure. This study provides guidelines for improving the switching energy-delay characteristics and the operating voltage of the NC + NEM relay (vs. the NEM relay) by optimizing the device design variables.
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