X-Ray Structural Investigations Of n-Si Irradiated with Protons
| Autor: | Sharifa B. Utamuradova, Aliona V. Stanchik, Dilmurod Rakhmanov |
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| Jazyk: | English<br />Russian<br />Ukrainian |
| Rok vydání: | 2023 |
| Předmět: | |
| Zdroj: | East European Journal of Physics, Iss 2 (2023) |
| Druh dokumentu: | article |
| ISSN: | 2312-4334 2312-4539 |
| DOI: | 10.26565/2312-4334-2023-2-21 |
| Popis: | In this work, the effect of proton irradiation on the change in the structure of silicon samples doped with platinum was studied. The samples were irradiated with protons at a dose of 9×1014 cm-2 with an energy of 600 keV and a current of 1÷1.5 μA. To determine the change in the structure after irradiation, the methods of X-ray diffraction and atomic force microscopy were used. The obtained results indicate that doping with platinum does not lead to a modification of the cubic crystal structure of silicon, but only to minor changes in the structural characteristics and surface morphology. In this case, proton irradiation of a silicon single crystal with a dose of 9.0×1014 cm–2 with an energy of 600 keV leads to the formation of defects without the formation of an amorphous near-surface layer. |
| Databáze: | Directory of Open Access Journals |
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