| Autor: |
Yukihide Tsuji, Doyun Kim, Gwangsu Yoo, ByungHyun Hwang, Kwanghoon Kim, Donhwan Lee, Yoshinori Sasai, Shinwook Yi, Jaehoon Jeong, Dongchul Ihm, ChungSam Jun, Dae Sin Kim |
| Jazyk: |
angličtina |
| Rok vydání: |
2021 |
| Předmět: |
|
| Zdroj: |
AIP Advances, Vol 11, Iss 6, Pp 065129-065129-6 (2021) |
| Druh dokumentu: |
article |
| ISSN: |
2158-3226 |
| DOI: |
10.1063/5.0037138 |
| Popis: |
A small angle x-ray scattering simulator has been developed for metrology and inspection applications based on the first Born approximation considering non-ideal equipment-related factors. The simulator shows good reproducibility in various device structures and measurement environments, including slit-configurations and incident angles. In addition, a Q-space adaptive weighting method is proposed to enhance about 300% accuracy, especially on non-single repeated pitch structures such as VNAND with complex x-ray diffraction patterns. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
|
