The Crystal Structure and Properties of Barium Zirconate Titanate and Barium Stannate Titanate Thin Films for Microwave Applications

Autor:	A. V. Tumarkin, S. V. Razumov, A. G. Gagarin, A. M. Cherniavskii, N. A. Yalymov, M. V. Zlygostov, A. A. Poteshkina, Y. A. Uvarenkova, V. I. Ivanova
Jazyk:	ruština
Rok vydání:	2016
Předmět:	radio frequency magnetron sputtering thin films barium strontium titanate barium zirconate titanate barium stannate titanate x-ray diffraction Electronics TK7800-8360
Zdroj:	Известия высших учебных заведений России: Радиоэлектроника, Vol 0, Iss 5, Pp 61-64 (2016)
Druh dokumentu:	article
ISSN:	1993-8985 2658-4794
Popis:	Structural and radio frequency (RF) dielectric properties of thin films of ferroelectric solid solutions BaZrxTi1-xO3 and BaSnxTi1-xO3 obtained by RF magnetron sputtering of ceramic targets on Pt/ r-cut of Al2O3 sapphire substrate are investigated. A high tunability of thin layers and low values of dielectric loss acceptable for microwave application have been revealed.
Databáze:	Directory of Open Access Journals
Externí odkaz:	https://doaj.org/article/8de4d50b15734aca898aace6556b4763 Zobrazit plný text záznamu View record in DOAJ