Integrated optical-readout of a high-Q mechanical out-of-plane mode

Autor: Jingkun Guo, Simon Gröblacher
Jazyk: angličtina
Rok vydání: 2022
Předmět:
Zdroj: Light: Science & Applications, Vol 11, Iss 1, Pp 1-7 (2022)
Druh dokumentu: article
ISSN: 2047-7538
DOI: 10.1038/s41377-022-00966-7
Popis: Multilayer structures integrating a photonic crystal cavity and a mechanical resonator with a high-Q M out-of-plane mode are fabricated, exhibiting high optomechanical coupling.
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