| Autor: |
Qihui Yu, Henk-Willem Veltkamp, Remco J. Wiegerink, Joost C. Lötters |
| Jazyk: |
angličtina |
| Rok vydání: |
2024 |
| Předmět: |
|
| Zdroj: |
Micromachines, Vol 15, Iss 10, p 1230 (2024) |
| Druh dokumentu: |
article |
| ISSN: |
2072-666X |
| DOI: |
10.3390/mi15101230 |
| Popis: |
In this paper, a novel fabrication process for the realization of large, suspended microfluidic channels is presented. The method is based on Buried Channel Technology and uses a mixture of HF, HNO3, and water etchant, which has high selectivity between the silicon substrate and the silicon-rich silicon nitride mask material. Metal electrodes for actuation and read-out are integrated into the fabrication process. The microfluidic channels are released from the silicon substrate to allow the vibrational movement needed for the application. The resulting microfluidic channels have a near-circular cross-section, with a diameter up to 300 μm and a channel wall thickness of 1.5 μm. The structure of a micro-Coriolis mass-flow and density sensor is fabricated with this process as an example of a possible application. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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