Self-Compliance and High Performance Pt/HfOx/Ti RRAM Achieved through Annealing

Autor: Lei Wu, Hongxia Liu, Jinfu Lin, Shulong Wang
Jazyk: angličtina
Rok vydání: 2020
Předmět:
Zdroj: Nanomaterials, Vol 10, Iss 3, p 457 (2020)
Druh dokumentu: article
ISSN: 2079-4991
DOI: 10.3390/nano10030457
Popis: A self-compliance resistive random access memory (RRAM) achieved through thermal annealing of a Pt/HfOx/Ti structure. The electrical characteristic measurements show that the forming voltage of the device annealing at 500 °C decreased, and the switching ratio and uniformity improved. Tests on the device’s cycling endurance and data retention characteristics found that the device had over 1000 erase/write endurance and over 105 s of lifetime (85 °C). The switching mechanisms of the devices before and after annealing were also discussed.
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